Deviation from the path contour (P-CHAN-00122)

P-CHAN-00122

Maximum deviation of the B spline from the programmed path contour

Description

This parameter defines the maximum deviation of the B spline from the programmed path contour. The spline is deselected automatically if this deviation is exceeded.

Parameter

hsc.bspline.path_deviation

Data type

REAL64

Data range

0 ... MAX(REAL64)

Dimension

0.1µm

Default value

2000

Remarks