Residual path for edge bending is too small.
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Description
| With the function Edge bending active, the residual path P-CHAN-00030 defined in channel parameter list is reduced after activation of measurement signal via the measuring probe. The active path difference in the space between the actual measuring positions and the target positions must not be greater than P-CHAN-00030. For more information on edge bending see [PROG// Section: Edge bending (G108)].
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Response
| Class
| 1
| Movement stop.
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Solution
| Class
| 1
| P-CHAN-00030 must be increased.
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Parameter
| %1:
| Current value [0.1 µm or 0.0001°]
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Current residual edge bending path P-CHAN-00030.
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%2:
| Current value [0.1 µm or 0.0001°]
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Path difference in space between current measuring positions and nominal positions.
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%3:
| Current value [0.1 µm or 0.0001°]
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%4:
| Current value [0.1 µm or 0.0001°]
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%5:
| Current value [0.1 µm or 0.0001°]
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Error type
| -
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